8/14/2011	4:46:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2011	4:46:00 PM	Recipe started at 4:46 PM
8/14/2011	4:46:00 PM	Helium valve closed
8/14/2011	4:46:00 PM	H2 valve closed
8/14/2011	4:46:00 PM	BCl3 valve closed
8/14/2011	4:46:00 PM	PH3 valve closed
8/14/2011	4:46:00 PM	SiCl4 pre valve closed
8/14/2011	4:46:00 PM	SiCl4 post valve closed
8/14/2011	4:46:00 PM	Main Vac valve closed
8/14/2011	4:46:00 PM	Bypass valve closed
8/14/2011	4:46:00 PM	Bubbler valve closed
8/14/2011	4:46:00 PM	Helium MFC set to  0.000000
8/14/2011	4:46:00 PM	H2 MFC set to  0.000000
8/14/2011	4:46:00 PM	BCl3 MFC set to  0.000000
8/14/2011	4:46:00 PM	PHl3 MFC set to  0.000000
8/14/2011	4:46:00 PM	SiCl4 MFC set to  0.000000
8/14/2011	4:46:00 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	4:46:01 PM	Tube furnace set to 0
8/14/2011	4:46:04 PM	H2 valve closed
8/14/2011	4:46:04 PM	BCl3 valve closed
8/14/2011	4:46:04 PM	PH3 valve closed
8/14/2011	4:46:04 PM	SiCl4 pre valve closed
8/14/2011	4:46:04 PM	SiCl4 post valve closed
8/14/2011	4:46:04 PM	Main Vac valve closed
8/14/2011	4:46:04 PM	Bypass valve closed
8/14/2011	4:46:04 PM	Bubbler valve closed
8/14/2011	4:46:04 PM	Helium valve opened
8/14/2011	4:46:04 PM	Helium MFC set to  500.000000
8/14/2011	4:46:04 PM	H2 MFC set to  0.000000
8/14/2011	4:46:04 PM	BCl3 MFC set to  0.000000
8/14/2011	4:46:04 PM	PHl3 MFC set to  0.000000
8/14/2011	4:46:04 PM	SiCl4 MFC set to  0.000000
8/14/2011	4:46:04 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	4:46:04 PM	Tube furnace set to 0
8/14/2011	4:47:09 PM	Helium valve closed
8/14/2011	4:47:09 PM	H2 valve closed
8/14/2011	4:47:09 PM	BCl3 valve closed
8/14/2011	4:47:09 PM	PH3 valve closed
8/14/2011	4:47:09 PM	SiCl4 pre valve closed
8/14/2011	4:47:09 PM	SiCl4 post valve closed
8/14/2011	4:47:09 PM	Main Vac valve closed
8/14/2011	4:47:09 PM	Bypass valve closed
8/14/2011	4:47:09 PM	Bubbler valve closed
8/14/2011	4:47:09 PM	Helium MFC set to  0.000000
8/14/2011	4:47:09 PM	H2 MFC set to  0.000000
8/14/2011	4:47:09 PM	BCl3 MFC set to  0.000000
8/14/2011	4:47:09 PM	PHl3 MFC set to  0.000000
8/14/2011	4:47:09 PM	SiCl4 MFC set to  0.000000
8/14/2011	4:47:09 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	4:47:09 PM	Tube furnace set to 0
8/14/2011	4:47:10 PM	Run finished at 4:47 PM
8/14/2011	4:47:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2011	4:49:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/14/2011	4:49:44 PM	Recipe started at 4:49 PM
8/14/2011	4:49:44 PM	Helium valve closed
8/14/2011	4:49:44 PM	H2 valve closed
8/14/2011	4:49:44 PM	BCl3 valve closed
8/14/2011	4:49:44 PM	PH3 valve closed
8/14/2011	4:49:44 PM	SiCl4 pre valve closed
8/14/2011	4:49:44 PM	SiCl4 post valve closed
8/14/2011	4:49:44 PM	Main Vac valve closed
8/14/2011	4:49:44 PM	Bubbler valve closed
8/14/2011	4:49:44 PM	Bypass valve opened
8/14/2011	4:49:44 PM	Helium MFC set to  0.000000
8/14/2011	4:49:44 PM	H2 MFC set to  0.000000
8/14/2011	4:49:44 PM	BCl3 MFC set to  0.000000
8/14/2011	4:49:44 PM	PHl3 MFC set to  0.000000
8/14/2011	4:49:44 PM	SiCl4 MFC set to  0.000000
8/14/2011	4:49:44 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	4:49:44 PM	Tube furnace set to 0
8/14/2011	4:50:51 PM	Helium valve closed
8/14/2011	4:50:51 PM	H2 valve closed
8/14/2011	4:50:51 PM	BCl3 valve closed
8/14/2011	4:50:51 PM	PH3 valve closed
8/14/2011	4:50:51 PM	SiCl4 pre valve closed
8/14/2011	4:50:51 PM	SiCl4 post valve closed
8/14/2011	4:50:51 PM	Main Vac valve closed
8/14/2011	4:50:51 PM	Bubbler valve closed
8/14/2011	4:50:51 PM	Bypass valve opened
8/14/2011	4:50:51 PM	Helium MFC set to  0.000000
8/14/2011	4:50:51 PM	H2 MFC set to  0.000000
8/14/2011	4:50:51 PM	BCl3 MFC set to  0.000000
8/14/2011	4:50:51 PM	PHl3 MFC set to  0.000000
8/14/2011	4:50:51 PM	SiCl4 MFC set to  0.000000
8/14/2011	4:50:51 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	4:50:52 PM	Tube furnace set to 0
8/14/2011	4:51:52 PM	Helium valve closed
8/14/2011	4:51:52 PM	H2 valve closed
8/14/2011	4:51:52 PM	BCl3 valve closed
8/14/2011	4:51:52 PM	PH3 valve closed
8/14/2011	4:51:52 PM	SiCl4 pre valve closed
8/14/2011	4:51:52 PM	SiCl4 post valve closed
8/14/2011	4:51:52 PM	Bypass valve closed
8/14/2011	4:51:52 PM	Bubbler valve closed
8/14/2011	4:51:52 PM	Main Vac valve opened
8/14/2011	4:51:52 PM	Helium MFC set to  0.000000
8/14/2011	4:51:52 PM	H2 MFC set to  0.000000
8/14/2011	4:51:52 PM	BCl3 MFC set to  0.000000
8/14/2011	4:51:52 PM	PHl3 MFC set to  0.000000
8/14/2011	4:51:52 PM	SiCl4 MFC set to  0.000000
8/14/2011	4:51:52 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	4:51:52 PM	Tube furnace set to 0
8/14/2011	4:51:53 PM	Run finished at 4:51 PM
8/14/2011	4:51:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/14/2011	5:12:09 PM	Helium MFC set to  20.000000
8/14/2011	5:12:14 PM	Helium valve opened
8/14/2011	5:16:52 PM	Helium valve closed
8/14/2011	5:17:34 PM	Helium MFC set to  0.000000
8/14/2011	5:18:47 PM	Main Vac valve closed
8/14/2011	5:18:51 PM	Main Vac valve opened
8/14/2011	5:19:37 PM	Main Vac valve closed
8/14/2011	5:19:48 PM	Main Vac valve opened
8/14/2011	5:20:52 PM	Tube furnace set to 50
8/14/2011	5:21:10 PM	Helium MFC set to  10.000000
8/14/2011	5:21:11 PM	Helium valve opened
8/14/2011	5:21:52 PM	Helium MFC set to  0.000000
8/14/2011	5:21:53 PM	Helium valve closed
8/14/2011	5:22:13 PM	Main Vac valve closed
8/14/2011	5:22:27 PM	Main Vac valve opened
8/14/2011	5:22:53 PM	Helium MFC set to  10.000000
8/14/2011	5:22:54 PM	Helium valve opened
8/14/2011	5:23:29 PM	Helium valve closed
8/14/2011	5:23:31 PM	Helium MFC set to  0.000000
8/14/2011	5:25:10 PM	Recipe started at 5:25 PM
8/14/2011	5:25:10 PM	Helium valve closed
8/14/2011	5:25:10 PM	H2 valve closed
8/14/2011	5:25:10 PM	BCl3 valve closed
8/14/2011	5:25:10 PM	PH3 valve closed
8/14/2011	5:25:10 PM	SiCl4 pre valve closed
8/14/2011	5:25:10 PM	SiCl4 post valve closed
8/14/2011	5:25:10 PM	Main Vac valve closed
8/14/2011	5:25:10 PM	Bypass valve closed
8/14/2011	5:25:10 PM	Bubbler valve closed
8/14/2011	5:25:10 PM	Helium MFC set to  0.000000
8/14/2011	5:25:10 PM	H2 MFC set to  0.000000
8/14/2011	5:25:10 PM	BCl3 MFC set to  0.000000
8/14/2011	5:25:10 PM	PHl3 MFC set to  0.000000
8/14/2011	5:25:10 PM	SiCl4 MFC set to  0.000000
8/14/2011	5:25:10 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	5:25:10 PM	Tube furnace set to 0
8/14/2011	5:25:13 PM	Helium valve closed
8/14/2011	5:25:13 PM	BCl3 valve closed
8/14/2011	5:25:13 PM	PH3 valve closed
8/14/2011	5:25:13 PM	SiCl4 pre valve closed
8/14/2011	5:25:13 PM	SiCl4 post valve closed
8/14/2011	5:25:13 PM	Main Vac valve closed
8/14/2011	5:25:13 PM	Bypass valve closed
8/14/2011	5:25:13 PM	Bubbler valve closed
8/14/2011	5:25:13 PM	H2 valve opened
8/14/2011	5:25:13 PM	Helium MFC set to  0.000000
8/14/2011	5:25:13 PM	H2 MFC set to  500.000000
8/14/2011	5:25:13 PM	BCl3 MFC set to  0.000000
8/14/2011	5:25:13 PM	PHl3 MFC set to  0.000000
8/14/2011	5:25:13 PM	SiCl4 MFC set to  0.000000
8/14/2011	5:25:13 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	5:25:13 PM	Tube furnace set to 0
8/14/2011	5:26:19 PM	Helium valve closed
8/14/2011	5:26:19 PM	BCl3 valve closed
8/14/2011	5:26:19 PM	PH3 valve closed
8/14/2011	5:26:19 PM	SiCl4 pre valve closed
8/14/2011	5:26:19 PM	SiCl4 post valve closed
8/14/2011	5:26:19 PM	Main Vac valve closed
8/14/2011	5:26:19 PM	Bypass valve closed
8/14/2011	5:26:19 PM	H2 valve opened
8/14/2011	5:26:19 PM	Bubbler valve opened
8/14/2011	5:26:19 PM	Helium MFC set to  0.000000
8/14/2011	5:26:19 PM	H2 MFC set to  500.000000
8/14/2011	5:26:19 PM	BCl3 MFC set to  0.000000
8/14/2011	5:26:19 PM	PHl3 MFC set to  0.000000
8/14/2011	5:26:19 PM	SiCl4 MFC set to  0.000000
8/14/2011	5:26:19 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	5:26:20 PM	Tube furnace set to 0
8/14/2011	5:26:21 PM	Helium valve closed
8/14/2011	5:26:21 PM	BCl3 valve closed
8/14/2011	5:26:21 PM	PH3 valve closed
8/14/2011	5:26:21 PM	SiCl4 pre valve closed
8/14/2011	5:26:21 PM	SiCl4 post valve closed
8/14/2011	5:26:21 PM	Main Vac valve closed
8/14/2011	5:26:21 PM	Bypass valve closed
8/14/2011	5:26:21 PM	H2 valve opened
8/14/2011	5:26:21 PM	Bubbler valve opened
8/14/2011	5:26:21 PM	Helium MFC set to  0.000000
8/14/2011	5:26:21 PM	H2 MFC set to  500.000000
8/14/2011	5:26:21 PM	BCl3 MFC set to  0.000000
8/14/2011	5:26:21 PM	PHl3 MFC set to  0.000000
8/14/2011	5:26:21 PM	SiCl4 MFC set to  0.000000
8/14/2011	5:26:21 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	5:26:21 PM	Tube furnace set to 1000
8/14/2011	5:51:21 PM	Helium valve closed
8/14/2011	5:51:21 PM	PH3 valve closed
8/14/2011	5:51:21 PM	Main Vac valve closed
8/14/2011	5:51:21 PM	Bypass valve closed
8/14/2011	5:51:21 PM	H2 valve opened
8/14/2011	5:51:21 PM	BCl3 valve opened
8/14/2011	5:51:21 PM	SiCl4 pre valve opened
8/14/2011	5:51:21 PM	SiCl4 post valve opened
8/14/2011	5:51:21 PM	Bubbler valve opened
8/14/2011	5:51:21 PM	Helium MFC set to  0.000000
8/14/2011	5:51:21 PM	H2 MFC set to  500.000000
8/14/2011	5:51:21 PM	BCl3 MFC set to  2.200000
8/14/2011	5:51:21 PM	PHl3 MFC set to  0.000000
8/14/2011	5:51:21 PM	SiCl4 MFC set to  50.000000
8/14/2011	5:51:21 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	5:51:21 PM	Tube furnace set to 1000
8/14/2011	5:53:21 PM	Helium valve closed
8/14/2011	5:53:21 PM	BCl3 valve closed
8/14/2011	5:53:21 PM	PH3 valve closed
8/14/2011	5:53:21 PM	SiCl4 pre valve closed
8/14/2011	5:53:21 PM	SiCl4 post valve closed
8/14/2011	5:53:21 PM	Main Vac valve closed
8/14/2011	5:53:21 PM	Bypass valve closed
8/14/2011	5:53:21 PM	H2 valve opened
8/14/2011	5:53:21 PM	Bubbler valve opened
8/14/2011	5:53:21 PM	Helium MFC set to  0.000000
8/14/2011	5:53:21 PM	H2 MFC set to  500.000000
8/14/2011	5:53:21 PM	BCl3 MFC set to  0.000000
8/14/2011	5:53:21 PM	PHl3 MFC set to  0.000000
8/14/2011	5:53:21 PM	SiCl4 MFC set to  0.000000
8/14/2011	5:53:21 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	5:53:21 PM	Tube furnace set to 750
8/14/2011	5:58:21 PM	H2 valve closed
8/14/2011	5:58:21 PM	BCl3 valve closed
8/14/2011	5:58:21 PM	PH3 valve closed
8/14/2011	5:58:21 PM	SiCl4 pre valve closed
8/14/2011	5:58:21 PM	SiCl4 post valve closed
8/14/2011	5:58:21 PM	Main Vac valve closed
8/14/2011	5:58:21 PM	Bypass valve closed
8/14/2011	5:58:21 PM	Helium valve opened
8/14/2011	5:58:21 PM	Bubbler valve opened
8/14/2011	5:58:21 PM	Helium MFC set to  400.000000
8/14/2011	5:58:21 PM	H2 MFC set to  0.000000
8/14/2011	5:58:21 PM	BCl3 MFC set to  0.000000
8/14/2011	5:58:21 PM	PHl3 MFC set to  0.000000
8/14/2011	5:58:21 PM	SiCl4 MFC set to  0.000000
8/14/2011	5:58:21 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	5:58:21 PM	Tube furnace set to 0
8/14/2011	6:18:21 PM	Helium valve closed
8/14/2011	6:18:21 PM	H2 valve closed
8/14/2011	6:18:21 PM	BCl3 valve closed
8/14/2011	6:18:21 PM	PH3 valve closed
8/14/2011	6:18:21 PM	SiCl4 pre valve closed
8/14/2011	6:18:21 PM	SiCl4 post valve closed
8/14/2011	6:18:21 PM	Main Vac valve closed
8/14/2011	6:18:21 PM	Bypass valve closed
8/14/2011	6:18:21 PM	Bubbler valve closed
8/14/2011	6:18:21 PM	Helium MFC set to  0.000000
8/14/2011	6:18:21 PM	H2 MFC set to  0.000000
8/14/2011	6:18:21 PM	BCl3 MFC set to  0.000000
8/14/2011	6:18:21 PM	PHl3 MFC set to  0.000000
8/14/2011	6:18:21 PM	SiCl4 MFC set to  0.000000
8/14/2011	6:18:21 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	6:18:21 PM	Tube furnace set to 0
8/14/2011	6:29:42 PM	Run finished at 6:29 PM
8/14/2011	6:29:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2011	6:29:45 PM	Recipe started at 6:29 PM
8/14/2011	6:29:45 PM	Helium valve closed
8/14/2011	6:29:45 PM	H2 valve closed
8/14/2011	6:29:45 PM	BCl3 valve closed
8/14/2011	6:29:45 PM	PH3 valve closed
8/14/2011	6:29:45 PM	SiCl4 pre valve closed
8/14/2011	6:29:45 PM	SiCl4 post valve closed
8/14/2011	6:29:45 PM	Main Vac valve closed
8/14/2011	6:29:45 PM	Bypass valve closed
8/14/2011	6:29:45 PM	Bubbler valve closed
8/14/2011	6:29:45 PM	Helium MFC set to  0.000000
8/14/2011	6:29:45 PM	H2 MFC set to  0.000000
8/14/2011	6:29:45 PM	BCl3 MFC set to  0.000000
8/14/2011	6:29:45 PM	PHl3 MFC set to  0.000000
8/14/2011	6:29:45 PM	SiCl4 MFC set to  0.000000
8/14/2011	6:29:45 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	6:29:46 PM	Tube furnace set to 0
8/14/2011	6:29:49 PM	H2 valve closed
8/14/2011	6:29:49 PM	BCl3 valve closed
8/14/2011	6:29:49 PM	PH3 valve closed
8/14/2011	6:29:49 PM	SiCl4 pre valve closed
8/14/2011	6:29:49 PM	SiCl4 post valve closed
8/14/2011	6:29:49 PM	Main Vac valve closed
8/14/2011	6:29:49 PM	Bypass valve closed
8/14/2011	6:29:49 PM	Bubbler valve closed
8/14/2011	6:29:49 PM	Helium valve opened
8/14/2011	6:29:49 PM	Helium MFC set to  500.000000
8/14/2011	6:29:49 PM	H2 MFC set to  0.000000
8/14/2011	6:29:49 PM	BCl3 MFC set to  0.000000
8/14/2011	6:29:49 PM	PHl3 MFC set to  0.000000
8/14/2011	6:29:49 PM	SiCl4 MFC set to  0.000000
8/14/2011	6:29:49 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	6:29:49 PM	Tube furnace set to 0
8/14/2011	6:29:51 PM	Helium valve closed
8/14/2011	6:29:51 PM	H2 valve closed
8/14/2011	6:29:51 PM	BCl3 valve closed
8/14/2011	6:29:51 PM	PH3 valve closed
8/14/2011	6:29:51 PM	SiCl4 pre valve closed
8/14/2011	6:29:51 PM	SiCl4 post valve closed
8/14/2011	6:29:51 PM	Main Vac valve closed
8/14/2011	6:29:51 PM	Bypass valve closed
8/14/2011	6:29:51 PM	Bubbler valve closed
8/14/2011	6:29:51 PM	Helium MFC set to  0.000000
8/14/2011	6:29:51 PM	H2 MFC set to  0.000000
8/14/2011	6:29:51 PM	BCl3 MFC set to  0.000000
8/14/2011	6:29:51 PM	PHl3 MFC set to  0.000000
8/14/2011	6:29:51 PM	SiCl4 MFC set to  0.000000
8/14/2011	6:29:51 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	6:29:51 PM	Tube furnace set to 0
8/14/2011	6:29:52 PM	Run finished at 6:29 PM
8/14/2011	6:29:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2011	6:34:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/14/2011	6:34:20 PM	Recipe started at 6:34 PM
8/14/2011	6:34:20 PM	Helium valve closed
8/14/2011	6:34:20 PM	H2 valve closed
8/14/2011	6:34:21 PM	BCl3 valve closed
8/14/2011	6:34:21 PM	PH3 valve closed
8/14/2011	6:34:21 PM	SiCl4 pre valve closed
8/14/2011	6:34:21 PM	SiCl4 post valve closed
8/14/2011	6:34:21 PM	Main Vac valve closed
8/14/2011	6:34:21 PM	Bubbler valve closed
8/14/2011	6:34:21 PM	Bypass valve opened
8/14/2011	6:34:21 PM	Helium MFC set to  0.000000
8/14/2011	6:34:21 PM	H2 MFC set to  0.000000
8/14/2011	6:34:21 PM	BCl3 MFC set to  0.000000
8/14/2011	6:34:21 PM	PHl3 MFC set to  0.000000
8/14/2011	6:34:21 PM	SiCl4 MFC set to  0.000000
8/14/2011	6:34:21 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	6:34:21 PM	Tube furnace set to 0
8/14/2011	6:35:27 PM	Helium valve closed
8/14/2011	6:35:27 PM	H2 valve closed
8/14/2011	6:35:27 PM	BCl3 valve closed
8/14/2011	6:35:27 PM	PH3 valve closed
8/14/2011	6:35:27 PM	SiCl4 pre valve closed
8/14/2011	6:35:27 PM	SiCl4 post valve closed
8/14/2011	6:35:27 PM	Main Vac valve closed
8/14/2011	6:35:27 PM	Bubbler valve closed
8/14/2011	6:35:27 PM	Bypass valve opened
8/14/2011	6:35:27 PM	Helium MFC set to  0.000000
8/14/2011	6:35:27 PM	H2 MFC set to  0.000000
8/14/2011	6:35:27 PM	BCl3 MFC set to  0.000000
8/14/2011	6:35:27 PM	PHl3 MFC set to  0.000000
8/14/2011	6:35:27 PM	SiCl4 MFC set to  0.000000
8/14/2011	6:35:27 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	6:35:27 PM	Tube furnace set to 0
8/14/2011	6:36:27 PM	Helium valve closed
8/14/2011	6:36:27 PM	H2 valve closed
8/14/2011	6:36:27 PM	BCl3 valve closed
8/14/2011	6:36:27 PM	PH3 valve closed
8/14/2011	6:36:27 PM	SiCl4 pre valve closed
8/14/2011	6:36:27 PM	SiCl4 post valve closed
8/14/2011	6:36:27 PM	Bypass valve closed
8/14/2011	6:36:27 PM	Bubbler valve closed
8/14/2011	6:36:27 PM	Main Vac valve opened
8/14/2011	6:36:27 PM	Helium MFC set to  0.000000
8/14/2011	6:36:27 PM	H2 MFC set to  0.000000
8/14/2011	6:36:27 PM	BCl3 MFC set to  0.000000
8/14/2011	6:36:27 PM	PHl3 MFC set to  0.000000
8/14/2011	6:36:27 PM	SiCl4 MFC set to  0.000000
8/14/2011	6:36:27 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	6:36:28 PM	Tube furnace set to 0
8/14/2011	6:36:29 PM	Run finished at 6:36 PM
8/14/2011	6:36:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/14/2011	6:48:39 PM	Helium MFC set to  20.000000
8/14/2011	6:48:41 PM	Helium valve opened
8/14/2011	7:02:43 PM	Helium valve closed
8/14/2011	7:02:47 PM	Helium MFC set to  0.000000
8/14/2011	7:03:12 PM	Main Vac valve closed
8/14/2011	7:03:25 PM	Main Vac valve opened
8/14/2011	7:05:41 PM	Recipe started at 7:05 PM
8/14/2011	7:05:41 PM	Helium valve closed
8/14/2011	7:05:41 PM	H2 valve closed
8/14/2011	7:05:41 PM	BCl3 valve closed
8/14/2011	7:05:41 PM	PH3 valve closed
8/14/2011	7:05:41 PM	SiCl4 pre valve closed
8/14/2011	7:05:41 PM	SiCl4 post valve closed
8/14/2011	7:05:41 PM	Main Vac valve closed
8/14/2011	7:05:41 PM	Bypass valve closed
8/14/2011	7:05:41 PM	Bubbler valve closed
8/14/2011	7:05:41 PM	Helium MFC set to  0.000000
8/14/2011	7:05:41 PM	H2 MFC set to  0.000000
8/14/2011	7:05:41 PM	BCl3 MFC set to  0.000000
8/14/2011	7:05:41 PM	PHl3 MFC set to  0.000000
8/14/2011	7:05:41 PM	SiCl4 MFC set to  0.000000
8/14/2011	7:05:41 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	7:05:41 PM	Tube furnace set to 0
8/14/2011	7:05:44 PM	Helium valve closed
8/14/2011	7:05:44 PM	BCl3 valve closed
8/14/2011	7:05:44 PM	PH3 valve closed
8/14/2011	7:05:44 PM	SiCl4 pre valve closed
8/14/2011	7:05:44 PM	SiCl4 post valve closed
8/14/2011	7:05:44 PM	Main Vac valve closed
8/14/2011	7:05:44 PM	Bypass valve closed
8/14/2011	7:05:44 PM	Bubbler valve closed
8/14/2011	7:05:44 PM	H2 valve opened
8/14/2011	7:05:44 PM	Helium MFC set to  0.000000
8/14/2011	7:05:44 PM	H2 MFC set to  500.000000
8/14/2011	7:05:44 PM	BCl3 MFC set to  0.000000
8/14/2011	7:05:44 PM	PHl3 MFC set to  0.000000
8/14/2011	7:05:44 PM	SiCl4 MFC set to  0.000000
8/14/2011	7:05:44 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	7:05:44 PM	Tube furnace set to 0
8/14/2011	7:06:52 PM	Helium valve closed
8/14/2011	7:06:52 PM	BCl3 valve closed
8/14/2011	7:06:52 PM	PH3 valve closed
8/14/2011	7:06:52 PM	SiCl4 pre valve closed
8/14/2011	7:06:52 PM	SiCl4 post valve closed
8/14/2011	7:06:52 PM	Main Vac valve closed
8/14/2011	7:06:52 PM	Bypass valve closed
8/14/2011	7:06:52 PM	H2 valve opened
8/14/2011	7:06:52 PM	Bubbler valve opened
8/14/2011	7:06:52 PM	Helium MFC set to  0.000000
8/14/2011	7:06:52 PM	H2 MFC set to  500.000000
8/14/2011	7:06:52 PM	BCl3 MFC set to  0.000000
8/14/2011	7:06:52 PM	PHl3 MFC set to  0.000000
8/14/2011	7:06:52 PM	SiCl4 MFC set to  0.000000
8/14/2011	7:06:52 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	7:06:52 PM	Tube furnace set to 0
8/14/2011	7:06:53 PM	Helium valve closed
8/14/2011	7:06:53 PM	BCl3 valve closed
8/14/2011	7:06:53 PM	PH3 valve closed
8/14/2011	7:06:53 PM	SiCl4 pre valve closed
8/14/2011	7:06:53 PM	SiCl4 post valve closed
8/14/2011	7:06:53 PM	Main Vac valve closed
8/14/2011	7:06:53 PM	Bypass valve closed
8/14/2011	7:06:53 PM	H2 valve opened
8/14/2011	7:06:53 PM	Bubbler valve opened
8/14/2011	7:06:53 PM	Helium MFC set to  0.000000
8/14/2011	7:06:53 PM	H2 MFC set to  480.000000
8/14/2011	7:06:53 PM	BCl3 MFC set to  0.000000
8/14/2011	7:06:53 PM	PHl3 MFC set to  0.000000
8/14/2011	7:06:53 PM	SiCl4 MFC set to  0.000000
8/14/2011	7:06:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	7:06:53 PM	Tube furnace set to 1000
8/14/2011	7:31:53 PM	Helium valve closed
8/14/2011	7:31:53 PM	PH3 valve closed
8/14/2011	7:31:53 PM	Main Vac valve closed
8/14/2011	7:31:53 PM	Bypass valve closed
8/14/2011	7:31:53 PM	H2 valve opened
8/14/2011	7:31:53 PM	BCl3 valve opened
8/14/2011	7:31:53 PM	SiCl4 pre valve opened
8/14/2011	7:31:53 PM	SiCl4 post valve opened
8/14/2011	7:31:53 PM	Bubbler valve opened
8/14/2011	7:31:53 PM	Helium MFC set to  0.000000
8/14/2011	7:31:53 PM	H2 MFC set to  500.000000
8/14/2011	7:31:53 PM	BCl3 MFC set to  2.000000
8/14/2011	7:31:53 PM	PHl3 MFC set to  0.000000
8/14/2011	7:31:53 PM	SiCl4 MFC set to  50.000000
8/14/2011	7:31:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	7:31:53 PM	Tube furnace set to 1000
8/14/2011	7:46:53 PM	Helium valve closed
8/14/2011	7:46:53 PM	BCl3 valve closed
8/14/2011	7:46:53 PM	PH3 valve closed
8/14/2011	7:46:53 PM	SiCl4 pre valve closed
8/14/2011	7:46:53 PM	SiCl4 post valve closed
8/14/2011	7:46:53 PM	Main Vac valve closed
8/14/2011	7:46:53 PM	Bypass valve closed
8/14/2011	7:46:53 PM	H2 valve opened
8/14/2011	7:46:53 PM	Bubbler valve opened
8/14/2011	7:46:53 PM	Helium MFC set to  0.000000
8/14/2011	7:46:53 PM	H2 MFC set to  450.000000
8/14/2011	7:46:53 PM	BCl3 MFC set to  0.000000
8/14/2011	7:46:53 PM	PHl3 MFC set to  0.000000
8/14/2011	7:46:53 PM	SiCl4 MFC set to  0.000000
8/14/2011	7:46:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	7:46:53 PM	Tube furnace set to 750
8/14/2011	7:51:53 PM	H2 valve closed
8/14/2011	7:51:53 PM	BCl3 valve closed
8/14/2011	7:51:53 PM	PH3 valve closed
8/14/2011	7:51:53 PM	SiCl4 pre valve closed
8/14/2011	7:51:53 PM	SiCl4 post valve closed
8/14/2011	7:51:53 PM	Main Vac valve closed
8/14/2011	7:51:53 PM	Bypass valve closed
8/14/2011	7:51:53 PM	Helium valve opened
8/14/2011	7:51:53 PM	Bubbler valve opened
8/14/2011	7:51:53 PM	Helium MFC set to  400.000000
8/14/2011	7:51:53 PM	H2 MFC set to  0.000000
8/14/2011	7:51:53 PM	BCl3 MFC set to  0.000000
8/14/2011	7:51:53 PM	PHl3 MFC set to  0.000000
8/14/2011	7:51:53 PM	SiCl4 MFC set to  0.000000
8/14/2011	7:51:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	7:51:54 PM	Tube furnace set to 0
8/14/2011	8:11:54 PM	Helium valve closed
8/14/2011	8:11:54 PM	H2 valve closed
8/14/2011	8:11:54 PM	BCl3 valve closed
8/14/2011	8:11:54 PM	PH3 valve closed
8/14/2011	8:11:54 PM	SiCl4 pre valve closed
8/14/2011	8:11:54 PM	SiCl4 post valve closed
8/14/2011	8:11:54 PM	Main Vac valve closed
8/14/2011	8:11:54 PM	Bypass valve closed
8/14/2011	8:11:54 PM	Bubbler valve closed
8/14/2011	8:11:54 PM	Helium MFC set to  0.000000
8/14/2011	8:11:54 PM	H2 MFC set to  0.000000
8/14/2011	8:11:54 PM	BCl3 MFC set to  0.000000
8/14/2011	8:11:54 PM	PHl3 MFC set to  0.000000
8/14/2011	8:11:54 PM	SiCl4 MFC set to  0.000000
8/14/2011	8:11:54 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	8:11:54 PM	Tube furnace set to 0
8/14/2011	8:48:18 PM	Run finished at 8:48 PM
8/14/2011	8:48:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2011	8:48:21 PM	Recipe started at 8:48 PM
8/14/2011	8:48:21 PM	Helium valve closed
8/14/2011	8:48:21 PM	H2 valve closed
8/14/2011	8:48:21 PM	BCl3 valve closed
8/14/2011	8:48:21 PM	PH3 valve closed
8/14/2011	8:48:21 PM	SiCl4 pre valve closed
8/14/2011	8:48:21 PM	SiCl4 post valve closed
8/14/2011	8:48:21 PM	Main Vac valve closed
8/14/2011	8:48:21 PM	Bypass valve closed
8/14/2011	8:48:21 PM	Bubbler valve closed
8/14/2011	8:48:21 PM	Helium MFC set to  0.000000
8/14/2011	8:48:21 PM	H2 MFC set to  0.000000
8/14/2011	8:48:21 PM	BCl3 MFC set to  0.000000
8/14/2011	8:48:21 PM	PHl3 MFC set to  0.000000
8/14/2011	8:48:21 PM	SiCl4 MFC set to  0.000000
8/14/2011	8:48:21 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	8:48:21 PM	Tube furnace set to 0
8/14/2011	8:48:24 PM	H2 valve closed
8/14/2011	8:48:24 PM	BCl3 valve closed
8/14/2011	8:48:24 PM	PH3 valve closed
8/14/2011	8:48:24 PM	SiCl4 pre valve closed
8/14/2011	8:48:24 PM	SiCl4 post valve closed
8/14/2011	8:48:24 PM	Main Vac valve closed
8/14/2011	8:48:24 PM	Bypass valve closed
8/14/2011	8:48:24 PM	Bubbler valve closed
8/14/2011	8:48:24 PM	Helium valve opened
8/14/2011	8:48:24 PM	Helium MFC set to  500.000000
8/14/2011	8:48:24 PM	H2 MFC set to  0.000000
8/14/2011	8:48:24 PM	BCl3 MFC set to  0.000000
8/14/2011	8:48:24 PM	PHl3 MFC set to  0.000000
8/14/2011	8:48:24 PM	SiCl4 MFC set to  0.000000
8/14/2011	8:48:24 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	8:48:25 PM	Tube furnace set to 0
8/14/2011	8:48:26 PM	Helium valve closed
8/14/2011	8:48:26 PM	H2 valve closed
8/14/2011	8:48:26 PM	BCl3 valve closed
8/14/2011	8:48:26 PM	PH3 valve closed
8/14/2011	8:48:26 PM	SiCl4 pre valve closed
8/14/2011	8:48:26 PM	SiCl4 post valve closed
8/14/2011	8:48:26 PM	Main Vac valve closed
8/14/2011	8:48:26 PM	Bypass valve closed
8/14/2011	8:48:26 PM	Bubbler valve closed
8/14/2011	8:48:26 PM	Helium MFC set to  0.000000
8/14/2011	8:48:26 PM	H2 MFC set to  0.000000
8/14/2011	8:48:26 PM	BCl3 MFC set to  0.000000
8/14/2011	8:48:26 PM	PHl3 MFC set to  0.000000
8/14/2011	8:48:26 PM	SiCl4 MFC set to  0.000000
8/14/2011	8:48:26 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	8:48:27 PM	Tube furnace set to 0
8/14/2011	8:48:28 PM	Run finished at 8:48 PM
8/14/2011	8:48:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2011	9:03:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2011	9:03:52 PM	Recipe started at 9:03 PM
8/14/2011	9:03:52 PM	Helium valve closed
8/14/2011	9:03:52 PM	H2 valve closed
8/14/2011	9:03:52 PM	BCl3 valve closed
8/14/2011	9:03:52 PM	PH3 valve closed
8/14/2011	9:03:52 PM	SiCl4 pre valve closed
8/14/2011	9:03:52 PM	SiCl4 post valve closed
8/14/2011	9:03:52 PM	Main Vac valve closed
8/14/2011	9:03:52 PM	Bypass valve closed
8/14/2011	9:03:52 PM	Bubbler valve closed
8/14/2011	9:03:52 PM	Helium MFC set to  0.000000
8/14/2011	9:03:52 PM	H2 MFC set to  0.000000
8/14/2011	9:03:52 PM	BCl3 MFC set to  0.000000
8/14/2011	9:03:52 PM	PHl3 MFC set to  0.000000
8/14/2011	9:03:52 PM	SiCl4 MFC set to  0.000000
8/14/2011	9:03:52 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	9:03:53 PM	Tube furnace set to 0
8/14/2011	9:03:56 PM	H2 valve closed
8/14/2011	9:03:56 PM	BCl3 valve closed
8/14/2011	9:03:56 PM	PH3 valve closed
8/14/2011	9:03:56 PM	SiCl4 pre valve closed
8/14/2011	9:03:56 PM	SiCl4 post valve closed
8/14/2011	9:03:56 PM	Main Vac valve closed
8/14/2011	9:03:56 PM	Bypass valve closed
8/14/2011	9:03:56 PM	Bubbler valve closed
8/14/2011	9:03:56 PM	Helium valve opened
8/14/2011	9:03:56 PM	Helium MFC set to  500.000000
8/14/2011	9:03:56 PM	H2 MFC set to  0.000000
8/14/2011	9:03:56 PM	BCl3 MFC set to  0.000000
8/14/2011	9:03:56 PM	PHl3 MFC set to  0.000000
8/14/2011	9:03:56 PM	SiCl4 MFC set to  0.000000
8/14/2011	9:03:56 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	9:03:56 PM	Tube furnace set to 0
8/14/2011	9:04:02 PM	Helium valve closed
8/14/2011	9:04:02 PM	H2 valve closed
8/14/2011	9:04:02 PM	BCl3 valve closed
8/14/2011	9:04:02 PM	PH3 valve closed
8/14/2011	9:04:02 PM	SiCl4 pre valve closed
8/14/2011	9:04:02 PM	SiCl4 post valve closed
8/14/2011	9:04:02 PM	Main Vac valve closed
8/14/2011	9:04:02 PM	Bypass valve closed
8/14/2011	9:04:02 PM	Bubbler valve closed
8/14/2011	9:04:02 PM	Helium MFC set to  0.000000
8/14/2011	9:04:02 PM	H2 MFC set to  0.000000
8/14/2011	9:04:02 PM	BCl3 MFC set to  0.000000
8/14/2011	9:04:02 PM	PHl3 MFC set to  0.000000
8/14/2011	9:04:02 PM	SiCl4 MFC set to  0.000000
8/14/2011	9:04:02 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	9:04:02 PM	Tube furnace set to 0
8/14/2011	9:04:03 PM	Run finished at 9:04 PM
8/14/2011	9:04:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2011	9:05:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/14/2011	9:05:28 PM	Recipe started at 9:05 PM
8/14/2011	9:05:28 PM	Helium valve closed
8/14/2011	9:05:28 PM	H2 valve closed
8/14/2011	9:05:28 PM	BCl3 valve closed
8/14/2011	9:05:28 PM	PH3 valve closed
8/14/2011	9:05:28 PM	SiCl4 pre valve closed
8/14/2011	9:05:28 PM	SiCl4 post valve closed
8/14/2011	9:05:28 PM	Main Vac valve closed
8/14/2011	9:05:28 PM	Bubbler valve closed
8/14/2011	9:05:28 PM	Bypass valve opened
8/14/2011	9:05:28 PM	Helium MFC set to  0.000000
8/14/2011	9:05:28 PM	H2 MFC set to  0.000000
8/14/2011	9:05:28 PM	BCl3 MFC set to  0.000000
8/14/2011	9:05:28 PM	PHl3 MFC set to  0.000000
8/14/2011	9:05:28 PM	SiCl4 MFC set to  0.000000
8/14/2011	9:05:28 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	9:05:28 PM	Tube furnace set to 0
8/14/2011	9:06:29 PM	Helium valve closed
8/14/2011	9:06:29 PM	H2 valve closed
8/14/2011	9:06:29 PM	BCl3 valve closed
8/14/2011	9:06:29 PM	PH3 valve closed
8/14/2011	9:06:29 PM	SiCl4 pre valve closed
8/14/2011	9:06:29 PM	SiCl4 post valve closed
8/14/2011	9:06:29 PM	Main Vac valve closed
8/14/2011	9:06:29 PM	Bubbler valve closed
8/14/2011	9:06:29 PM	Bypass valve opened
8/14/2011	9:06:29 PM	Helium MFC set to  0.000000
8/14/2011	9:06:29 PM	H2 MFC set to  0.000000
8/14/2011	9:06:29 PM	BCl3 MFC set to  0.000000
8/14/2011	9:06:29 PM	PHl3 MFC set to  0.000000
8/14/2011	9:06:29 PM	SiCl4 MFC set to  0.000000
8/14/2011	9:06:29 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	9:06:29 PM	Tube furnace set to 0
8/14/2011	9:07:29 PM	Helium valve closed
8/14/2011	9:07:29 PM	H2 valve closed
8/14/2011	9:07:29 PM	BCl3 valve closed
8/14/2011	9:07:29 PM	PH3 valve closed
8/14/2011	9:07:29 PM	SiCl4 pre valve closed
8/14/2011	9:07:29 PM	SiCl4 post valve closed
8/14/2011	9:07:29 PM	Bypass valve closed
8/14/2011	9:07:29 PM	Bubbler valve closed
8/14/2011	9:07:29 PM	Main Vac valve opened
8/14/2011	9:07:29 PM	Helium MFC set to  0.000000
8/14/2011	9:07:29 PM	H2 MFC set to  0.000000
8/14/2011	9:07:29 PM	BCl3 MFC set to  0.000000
8/14/2011	9:07:29 PM	PHl3 MFC set to  0.000000
8/14/2011	9:07:29 PM	SiCl4 MFC set to  0.000000
8/14/2011	9:07:29 PM	Bypass solenoid MFC set to  0.000000
8/14/2011	9:07:29 PM	Tube furnace set to 0
8/14/2011	9:07:30 PM	Run finished at 9:07 PM
8/14/2011	9:07:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
